Preface
1 Electrons and Holes in Semiconductors
1.1 Silicon Crystal Structure
1.2 Bond Model of Electrons and Holes
1.3 Energy Band Model
1.4 Semiconductors, Insulators, and Conductors
1.5 Electrons and Holes
1.6 Density of States
1.7 Thermal Equilibrium and the Fermi Function
1.8 Electron and Hole Concentrations
1.9 General Theory ofnandp
1.10 Carrier Concentrations at Extremely High and Low
Temperatures
1.11 Chapter Summary
PROBLEMS
REFERENCES
GENERAL REFERENCES
2 Motion and Recombination of Electrons and Holes
2.1 Thermal Motion
2.2 Drift
2.3 Diffusion Current
2.4 Relation Between the Energy Diagram and V,%
2.5 Einstein Relationship Between D and u
2.6 Electron-Hole Recombination
2.7 Thermal Generation
2.8 Quasi-Equilibrium and Quasi-Fermi Levels
2.9 Chapter Summary
PROBLEMS
REFERENCES
GENERAL REFERENCES
3 Device Fabrication Technology
3.1 Introduction to Device Fabrication
3.2 Oxidation of Silicon
3.3 Lithography
3.4 Pattern Transfer-Etching
3.5 Doping
3.6 Dopant Diffusion
3.7 Thin-Film Deposition
3.8 Interconnect-The Back-End Process
3.9 Testing, Assembly, and Qualification
3.10 Chapter Summary-A Device Fabrication Example
PROBLEMS
REFERENCES
GENERAL REFERENCES
4 PN and Metal-Semiconductor Junctions
Part 1 PN Junction
4.1 Building Blocks of the PN Junction Theory
4.2 * Depletion-Layer Model
4.3 Reverse-Biased PN Junction
4.4 Capacitance-Voltage Characteristics
4.5 Junction Breakdown
4.6 Carrier Injection Under Forward Bias——Quasi-Equilibrium
Boundary Condition
4.7 Current Continuity Equation
4.8 Excess Carriers in Forward-Biased PN Junction
4.9 PN Diode IV Characteristics
4.10 Charge Storage
4.11 Small-Signal Model of the Diode
Part 2 Application to Optoelectronic Devices
4.12 Solar Cells
4.13 Light-Emitting Diodes and Solid-State Lighting
……
5 MOS Capacitor
6 MOS Transistor
7 MOSFETs in ICs-Scaling, Leakage, and Other Topics
8 Bipolar Transistor
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