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| About the Authors x Preface xi Chapter 1 Introduction 1 1.1 Historical Perspective 1 1.2 Objective and Organization of the Book 5 1.3 A Circuit Design Example 8 1.4 Overview of VLSI Design Methodologies 18 1.5 VLSI Design Flow 21 1.6 Design Hierarchy 23 1.7 Concepts of Regularity Modularity,and Locality 25 1.8 VLSI Design Styles 28 1.9 Design Quality 38 1.10 Packaging Technology 4l 1.11 Computer-Aided Design Technology 43 Exercise Problems 45 Chapter 2 Fabrication of MOSFETs 48 2.1 Introduction 48 2.2 Fabricahon Process Flow: Basic Steps 49 2.3 The CMOS n-Well Process 59 2.4 Layout Design Rules 66 2.5 Full-Custom Mask Layout Design 66 Exercise Problems 73 Chapter 3 MOS Transistor 83 3.1 The Metal Oxide Semiconductor MOS Structure 83 3.2 The MOS System under External Bias 87 3.3 Structure and Operation of MOS Transistor MOSFET 90 3.4 MOSFET Current-Voltage Characteristics 100 3.5 MOSFET Scaling and Small-Geometry Effects 112 3.6 MOSFET Capacitances 126 |
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