| List of Contributors 1 High\|Resolution Scanning Electron Microscopy 1.1 Introduction: Scanning Electron Microscopy and Nanotechnology 1.2 Electron\|Specimen Interactions5 1.2.1 Electron\|Specimen Interactions in Homogeneous Materials 1.2.2 Electron\|Speciment Interactions in Composite Samples 1.3 Instrumentation of/the Scanning Electron Microscope 1.3.1 General Description 1.3.2 Performance of a Scanning Electron Microscope 1.4 The Resolution of Secondary and Backscattered Electron Images 1.5 Contrast Mechanisms of SE and BE Images of Nanoparticles and Other Systems 1.5.1 Small Particle Contrast in High\|Resolution BE Images 1.5.2 Small Particle Contrast in High\|Resolution SE Images 1.5.3 Other Contrast Mechanisms 1.6 Applications to Characterizing Nanophase Materials 1.7 Summary and Perspectives References 2 High Spatial Resolution Quantitative Electron Beam Microanalysis for Nanoscale Materials 2.1 Introduction 2.2 The Nanomaterials Characterization Challenge: Bulk Nanostructures and Discrete Nanoparticles 2.2.1 Bulk Nanostructures 2.2.2 Nanoparticles 2.3 Physical Basis of the Electron\|Excited Analytical Spectrometries 2.4 Nanoscale Elemental Characterization with High Electron Beam Energy 2.4.1 EELS 2.4.2 X\|ray Spectrometry 2.5 Nanoscale Elemental Characterization with Low and Intermediate Electron Beam Energy 2.5.1 Intermediate Beam Energy X\|ray Microanalysis 2.5.2 Low Beam Energy X\|ray Microanalysis: Bulk Nanostructures 2.5.3 Auger Spectrometry 2.5.4 Elemental Mapping 2.6 Examples of Applications to Nanoscale Materials 2.6.1 Analytical Electron Microscopy 2.6.2 Low Voltage SEM 2.6.3 Auger/X\|ray SEM 2.7 Conclusions References 3 Characterization of Nano\|Crystalline Materials Using Electron Backscatter Diffraction in the Scanning Electron Microscope 3.1 Introduction 3.2 Historical Development of EBSD 3.3 Origin of EBSD Patterns 3.3.1 Collection of EBSD Patterns 3.3.2 Automated Orientation Mapping 3.4 Resolution of EBSD 3.4.1 Lateral Resolution 3.4.2 Depth Resolution 3.5 Sample Preparation of Nano\|Materials for EBSD 3.6 Applications of EBSD to Nano\|Materials 3.6.1 Heteroepitaxy of Boron Arsenide on \[0001\] 6H\|Sic 3.6.2 Electrodeposited Ni for MEMS Applications 3.6.3 Polycrystalline Si For MEMS Applications 3.7 Summary References 4 High Resolution Transmission Electron Microscopy 4.1 HRTEM and Nanotechnology 4.2 Principles and Practice of HRTEM 4.2.1 Basis of Image Formation 4.2.2 Definitions of Resolution 4.2.3 Lattice Imaging or Atomic Imaging 4.2.4 Instrumental Parameters 4.2.5 Further Requirements 4.2.6 Milestones 4.3 Applications of HRTEM 4.3.1 Semiconductors …… 5 Scanning Transmission Electron Microscopy 6 In\|situ Electron Microscopy for Nanomeasurements 7 Environmental Transmission Electron Microscopy in Nanotechnology 8 Electron Nanocrystallography 9 Tomography Using the Transmission Electron Microscope 10 Off\|Axis Electron Holography 11 Sub\|nm Spatially Resolved EELS(Electron Energy\|Loss Spectroscopy): Methods,Theory and Applications 12 Imaging Magnetic Structures Using TEM Index |
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