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| Preface About the Authors Acknowledgments 1 Introduction 2 Electronic Materials and Processing 3 MEMS Materials and their Preparation 4 Standard Microelectronic Technologies 5 Silicon Micromachining:Bulk 6 Silicon Micromachining:Surface 7 Microstereolithography for MEMS 8 Microsensors 9 Introduction to SAW Devices 10 Surface Acoustic Waves in Solids 11 IDT Microsensor Parameter Measurement 12 IDT Microsensor Fabrication 13 IDT Microsensors 14 MEMS-IDT Microsensors 15 Smart Sensors and MEMS Appendices Index |
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