| 作者简介： Dr Hiroyuki Fujiwara is based at the National Institute of Advanced Industrial Science and Technology, Ibaraki, Japan. He received his PhD at the Tokyo Institute of Technology in 1996 and carried out post-doctoral research with Professor R.W. Collins at Penn State University. From 1998 to present he has been working as a senior research scientist at the Research Center for Photovoltaics at NIAIST. He received the 'Most Promising Young Scientist Award' from the Japan Society of Applied Physics and the 'Young Researcher Award' at the World Conference on Photovoltaic Energy Conversion in 2003. |
| Foreword Preface Acknowledgments 1 Introduction to Spectroscopic Ellipsometry 1.1 Features of Spectroscopic Ellipsometry 1.2 Applications of Spectroscopic Ellipsometry 1.3 Data Analysis 1.4 History of Development 1.5 Future Prospects References 2 Principles of Optics 2.1 Propagation of Light 2.2 Dielectrics 2.3 Reflection and Transmission of Light 2.4 Optical Interference References 3 Polarization of Light 3.1 Representation of Polarized Light 3.2 Optical Elements 3.3 Jones Matrix 3.4 Stokes Parameters References 4 Principles of Spectroscopic Ellipsometry 4.1 Principles of Ellipsometry Measurement 4.2 Ellipsometry Measurement 4.3 Instrumentation for Ellipsometry 4.4 Precision and Error of Measurement References 5 Data Analysis 6 Ellipsometry of Anisotropic Materials 7 Data Analysis Examples 8 Real-Time Monitoring by Spectroscopic Ellipsometry Appendices 1 Trigonometric Functions 2 Definitions of Optical Constants 3 Maxwell’s Equations for Conductors 4 Jones–Mueller Matrix Conversion 5 Kramers–Kronig Relations Index |
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